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Fabrication Engineering at the Micro- And Nanoscale (Oxford Series in Electrical and Computer Engineering) (Paperback)

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Description


Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

About the Author


Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.


Product Details
ISBN: 9780199861224
ISBN-10: 0199861226
Publisher: Oxford University Press, USA
Publication Date: November 15th, 2012
Pages: 671
Language: English
Series: Oxford Series in Electrical and Computer Engineering (Paperback)